Department  of Materials Science  and Engineering   
School of Engineering  and Material Science

 

 

 

 

 

 

 

 RESEARCH INTERESTS

I. Preparation and characterization of carbon nitride films. Carbon nitride thin films are prepared by chemical and/or physical vapor deposition method, and their structure, properties and surface morphology are examined. Detailed topics are:

(1) Preparation of amorphous carbon nitride films from a graphite and nitrogen gas by rf reactive sputtering and studying electric properties.
(2) Preparation of carbon nitride films from a gas mixture of carbon dioxide and nitrogen by PECVD.
(3) Preparation of carbon nano tubes from a gas mixture of methane and nitrogen by hot-filament CVD and studying the nucleation and growth process of carbon nano tubes.