Department  of Materials Science  and Engineering   
School of Engineering  and Material Science









I. Preparation and characterization of carbon nitride films. Carbon nitride thin films are prepared by chemical and/or physical vapor deposition method, and their structure, properties and surface morphology are examined. Detailed topics are:

(1) Preparation of amorphous carbon nitride films from a graphite and nitrogen gas by rf reactive sputtering and studying electric properties.
(2) Preparation of carbon nitride films from a gas mixture of carbon dioxide and nitrogen by PECVD.
(3) Preparation of carbon nano tubes from a gas mixture of methane and nitrogen by hot-filament CVD and studying the nucleation and growth process of carbon nano tubes.